Thursday, May 2025

02:10 PM - 02:30 PM

Room: LL21EF

Session: High Mobility Oxide TFTs

High-Mobility Metal-Oxide TFT Development for IT AMOLED Applications

Invited

• 

  Supervisor

  Fa-Hsyang Chen , PhD

  Visionox Technology Inc.

Description:

we demonstrated the high mobility metal oxide TFTs with small Vth variation and good electrical reliability in Gen. 6 and Gen. 4.5 factory. Moreover, The 13.2 and 12.6 inch AMOLED displays have been successfully developed with MO-1 and MO-2 backplane technology, respectively. Furthermore, the MO-3 metal oxide TFTs were fabricated with high mobility (55 cm2/Vs) by using atom layer deposition (ALD) technology.