Thursday, May 2025

05:00 PM - 08:00 PM

Room: 220A

Session: Display Manufacturing Posters

Reducing Insulator Lifting and Etched Active-Pattern Defects Due to Separated Design of Large Power Line

Description:

QD-Displays are one of the best flat panel display in the world that started to be produced by the largest display panel supplier, Samsung Display Co., LTD. For low production cost, we had the extreme yield goal. One of main defects was “insulator lifting and etched active pattern”. In this paper, we found the clue to solve the root cause by identifying defect generation mechanism and defect rate relating to panel size. Insulator lifting was occurred electron accumulation from active deposition gases on substrate surface in active deposition chamber and etched active pattern was generated by Galvanic corrosion during active etch process. Large power line separated design was able to reduce insulator lifting and etch active pattern because large power line area plays a role to attract electrons from gases of active deposition to substrate surface in active sputtering. This noble design improved insulator lifting and etched active pattern to zero in middle and large size panel of TV application. And, large powe