Thursday, May 2025

05:00 PM - 08:00 PM

Room: 220A

Session: Display Manufacturing Posters

Cost-Effective, High-k AlOx Dielectric by Spray Pyrolysis for LTPS and Oxide Thin-Film Transistors

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  Professor of Advanced Display Research Center

  Jin Jang , PhD

  Kyung Hee University

Description:

We present a cost-effective spray pyrolysis method to develop high-k AlOx dielectric films for LTPS and IGO TFTs. The AlOx film shows a dielectric constant of 8.46 and a breakdown voltage of 9.25 MV/cm. Short-channel p-type LTPS and n-type IGO TFTs with AlOx exhibit field-effect mobilities of 90 and 23 cm²/V·s, respectively.