Thursday, May 2025

09:20 AM - 09:40 AM

Room: LL21CD

Session: Display Manufacturing for AR/VR/MR

World’s First OLED Display Using 12-in. IGZO-on-Si 3D Monolithic Integration

• Shou-Zen Chang

  Powerchip Semiconductor Manufacturing Corp.

Description:

We prototyped a backplane with an IGZO-on-Si structure in a 12-inch wafer production line for the first time in the world. The monolithically formed Si FETs and OSFETs in the prototyped backplane exhibited good characteristics. Using the backplane, we successfully fabricated a 3527-ppi micro-OLED display for AR/VR application.