Tuesday, May 2025

11:30 AM - 11:50 AM

Room: LL21CD

Session: Display Manufacturing Using Metal Oxide

State-of-the-Art Gas Separation Function in Dynamic New Aristo TWIN PVD System Proven with IGZTO-IGZO Dual-Layer Thin-Film Transistor

• You-Ron Lin

  Applied Materials

Description:

This work presents the new hardware design to enable multilayer PVD coating in the dynamic PVD system New Aristo TWIN. Its performance is validated by PVD film uniformity, as well as IGZTO/IGZO dual layer top-gate TFT performance. By comparing the metal oxide film uniformity and the device properties, we conclude that the actual gas separation has reached comparable performance as the simulated perfect gas separated coating condition.