Friday, May 2025

01:50 PM - 02:10 PM

Room: LL21AB

Session: mmWave Systems Integration and Advanced Chiplet Packaging on Glass

Process Development for Active-Matrix-Addressed Liquid-Crystal Reconfigurable Intelligent Surfaces

• Markus Widmaier

  University of Stuttgart

Description:

This work presents design and development of an active matrix addressed liquid crystal based RIS for28 GHz centre frequency as well as fabrication and characterization of a column-wise direct-addressed 16x16 unit-cell prototype. For the implementation of low loss RF electrodes, a micro-galvanic copper deposition process has been integrated and optimized and the process compatibility with a-Si:H TFTs has been proven.