Thursday, May 2025

09:40 AM - 10:00 AM

Room: LL21CD

Session: Display Manufacturing for AR/VR/MR

Submicron c-IGO TFT Exhibiting High Performance and Excellent Stability for Ultra-High-Resolution Display

Student

Description:

We report a high-quality, stack poly-crystalline InGaO (c-IGO) thin-film transistor (TFT) for AMOLED display backplanes. The active layer with high Ga was sequentially deposited on low Ga IGO layer by spray pyrolysis. The TFTs with high-Ga top layer demonstrated superior stability for the TFT with 0.74 ?m channel length, exhibiting the field effect mobility of 9.18 cm2/V·s and VTH of 0 V with high on/off ratio of > 108.