Thursday, May 2025
09:40 AM - 10:00 AM
Room: LL21CD
Session: Display Manufacturing for AR/VR/MR
Submicron c-IGO TFT Exhibiting High Performance and Excellent Stability for Ultra-High-Resolution Display
Student
Description:
We report a high-quality, stack poly-crystalline InGaO (c-IGO) thin-film transistor (TFT) for AMOLED display backplanes. The active layer with high Ga was sequentially deposited on low Ga IGO layer by spray pyrolysis. The TFTs with high-Ga top layer demonstrated superior stability for the TFT with 0.74 ?m channel length, exhibiting the field effect mobility of 9.18 cm2/V·s and VTH of 0 V with high on/off ratio of > 108.