Tuesday, May 2025

05:00 PM - 05:10 PM

Room: LL21CD

Session: OLED Display Panel Manufacturing Processes/Equipment

Development of the In-Situ Thickness Monitoring and Feedback System for OLED Evapolation System.

Late-News

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  General Manager

  Eiichi Matsumoto , MA

  Canon Tokki Corporation

Description:

Canon Tokki has developed a In-situ thickness measurement and feedback system that can mesure actual film thickness on-site within OLED mass production equipment. Using this system, we have succeeded in controlling the sheet to sheet variation of OLED mass production equipment to less than +-1%.