Friday, May 2025

12:00 PM - 12:10 PM

Room: LL21AB

Session: Packaging Strategies for Advanced Displays

Silicon-on-Nothing Technology Based on Silicon Migration in Argon Annealing for Display-Sensor Integration

Late-News

• Qiuxu Wei

  Beijing BOE Sensor Technology Company, Ltd.

Description:

For applications involving interactive display-sensor systems, this study investigates silicon migration technology using argon annealing for low-cost silicon-on-nothing structures to improve integration compatibility. Argon-based rapid thermal processing offers enhanced safety and cost reduction compared to hydrogen-based methods. The results demonstrate the successful formation of in-situ-sealed silicon diaphragms with uniform thickness and varying dimensions for pressure sensing applications.