Thursday, May 2025

11:00 AM - 11:20 AM

Room: LL21EF

Session: New Oxide TFTs and Applications

High-Performance P-Type Tellurium-Based Thin-Film Transistors on a 6-in. Wafer and Their Applications

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  Principal Researcher

  Sooji Nam , PhD

  Electronics and Telecommunications Research Institute

Description:

Here, we report on the sputtered p-type Tellurium (Te) thin-film transistors (TFTs) and circuits with high device performances. We also fabricate and optimize the device characteristics of p-type Te TFTs with sub-100 nm channel length using a novel photolithography method. Finally, vertically integrating p-type TFTs with n-type ones are demonstrated for monolithic 3-dimensional (M3D) applications.